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Browsing by Author "Butera, Geni"

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    Degradation and failure analysis of copper and tungsten contacts under high fluence stress

    Kauerauf, Thomas
    ;
    Butera, Geni
    ;
    Croes, Kristof  
    ;
    Demuynck, Steven  
    ;
    Wilson, Chris  
    Proceedings paper
    2010, 48th Annual IEEE International Reliability Physics Symposium - IRPS, 3/05/2010, p.712-716
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    On the reliability of Cu contacts for the 32nm technology node and beyond

    Kauerauf, Thomas
    ;
    Demuynck, Steven  
    ;
    Butera, Geni
    ;
    Bogan, Justin
    ;
    Tokei, Zsolt  
    Proceedings paper
    2009, International Conference on Solid State Devices and Materials - SSDM, 7/10/2009, p.799-800

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