Browsing by Author "Buttgereit, Ute"
Now showing 1 - 3 of 3
- Results Per Page
- Sort Options
Publication Effective use of aerial image metrology for calibration of OPC models
Publication Phame: phase measurements on 45nm node phase shift features
Proceedings paper2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70282ZPublication Phase behavior through pitch and duty cycle and its impact on process window
Proceedings paper2009, Photomask and Next-Generation Lithography Mask Technology XVI, 8/04/2009, p.737916