Effective use of aerial image metrology for calibration of OPC models

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Author(s)

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Buttgereit, Ute

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Chung, Angeline

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Burbine, Andrew

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Sturtevant, John

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Clifford, Chris

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De Bisschop, Peter

Metrics

1906 since deposited on 2021-10-24

Acq. date: 2025-10-27