Publication:

Effective use of aerial image metrology for calibration of OPC models

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2258632

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Files

35393.pdf 1.64 MB

Author(s)

;

;

;

Buttgereit, Ute

;

Chung, Angeline

;

Burbine, Andrew

;

Sturtevant, John

;

Clifford, Chris

;

;

De Bisschop, Peter

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1911 since deposited on 2021-10-24

Acq. date: 2026-09-16