Browsing by Author "Buxbaum, Alex"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Impact of AAPSM etch depth linearity in ArF immersion lithography
Proceedings paper2005, 2nd International Symposium on Immersion Lithography, 12/09/2005Publication Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
Proceedings paper2005, Photomask and Next-Generation Lithography Mask Technology XII, 13/04/2005, p.211-222