Publication:
Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
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1888 since deposited on 2021-10-16
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Acq. date: 2026-01-25
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Statistics
Views
1888 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-01-25
Citations