Publication:
Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications
Date
| dc.contributor.author | Philipsen, Vicky | |
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | De Ruyter, Rudi | |
| dc.contributor.author | Jonckheere, Rik | |
| dc.contributor.author | Martin, Patrick | |
| dc.contributor.author | Wakefield, Clare | |
| dc.contributor.author | Johnson, Stephen | |
| dc.contributor.author | Cangemi, Mike | |
| dc.contributor.author | Buxbaum, Alex | |
| dc.contributor.author | Morrison, Troy | |
| dc.contributor.imecauthor | Philipsen, Vicky | |
| dc.contributor.imecauthor | De Ruyter, Rudi | |
| dc.contributor.imecauthor | Jonckheere, Rik | |
| dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
| dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
| dc.date.accessioned | 2021-10-16T04:04:17Z | |
| dc.date.available | 2021-10-16T04:04:17Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11016 | |
| dc.source.beginpage | 211 | |
| dc.source.conference | Photomask and Next-Generation Lithography Mask Technology XII | |
| dc.source.conferencedate | 13/04/2005 | |
| dc.source.conferencelocation | Yokohama Japan | |
| dc.source.endpage | 222 | |
| dc.title | Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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