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Browsing by Author "Byun, Y."

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    Publication

    Selective ALD Mo Deposition in 10nm Contacts

    van der Veen, Marleen  
    ;
    Maes, J. W.
    ;
    Varela Pedreira, Olalla  
    ;
    Zhu, C.
    ;
    Tierno, Davide  
    ;
    Datta, S.
    Proceedings paper
    2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023

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