Publication:

Selective ALD Mo Deposition in 10nm Contacts

Date

2023

Proceedings Paper

https://doi.org/10.1109/IITC/MAM57687.2023.10154783

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Author(s)

van der Veen, Marleen

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Varela Pedreira, Olalla

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Jourdan, Nicolas

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Decoster, Stefan

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Struyf, Herbert

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Journal

N/A

Metrics

813 since deposited on 2023-08-07

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Acq. date: 2026-01-07