Publication:
Selective ALD Mo Deposition in 10nm Contacts
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Maes, J. W. | |
| dc.contributor.author | Varela Pedreira, Olalla | |
| dc.contributor.author | Zhu, C. | |
| dc.contributor.author | Tierno, Davide | |
| dc.contributor.author | Datta, S. | |
| dc.contributor.author | Jourdan, Nicolas | |
| dc.contributor.author | Decoster, Stefan | |
| dc.contributor.author | Wu, Chen | |
| dc.contributor.author | Mousa, M. | |
| dc.contributor.author | Byun, Y. | |
| dc.contributor.author | Struyf, Herbert | |
| dc.contributor.author | Park, Seongho | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.imecauthor | Varela Pedreira, Olalla | |
| dc.contributor.imecauthor | Tierno, Davide | |
| dc.contributor.imecauthor | Jourdan, Nicolas | |
| dc.contributor.imecauthor | Decoster, Stefan | |
| dc.contributor.imecauthor | Wu, Chen | |
| dc.contributor.imecauthor | Struyf, Herbert | |
| dc.contributor.imecauthor | Park, Seongho | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.contributor.orcidimec | Varela Pedreira, Olalla::0000-0002-2987-1972 | |
| dc.contributor.orcidimec | Tierno, Davide::0000-0003-4915-904X | |
| dc.contributor.orcidimec | Jourdan, Nicolas::0009-0005-4798-1736 | |
| dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
| dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
| dc.contributor.orcidimec | Struyf, Herbert::0000-0002-6782-5424 | |
| dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
| dc.date.accessioned | 2024-05-06T14:30:16Z | |
| dc.date.available | 2023-08-07T17:07:38Z | |
| dc.date.available | 2024-05-06T14:30:16Z | |
| dc.date.issued | 2023 | |
| dc.identifier.doi | 10.1109/IITC/MAM57687.2023.10154783 | |
| dc.identifier.eisbn | 979-8-3503-1097-9 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42296 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
| dc.source.conferencedate | MAY 22-25, 2023 | |
| dc.source.conferencelocation | Dresden | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 3 | |
| dc.title | Selective ALD Mo Deposition in 10nm Contacts | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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