Browsing by Author "Calabretta, C."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted 4H-SiC epitaxial layers
Journal article2024, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, (174) May, p.Art. 108175Publication Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars