Publication:
Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted 4H-SiC epitaxial layers
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277 since deposited on 2024-03-26
1last month
Acq. date: 2025-12-12
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Views
277 since deposited on 2024-03-26
1last month
Acq. date: 2025-12-12
Citations