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Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted 4H-SiC epitaxial layers
Publication:
Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted 4H-SiC epitaxial layers
Date
2024
Journal article
https://doi.org/10.1016/j.mssp.2024.108175
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Calabretta, C.
;
Pecora, A.
;
Agati, Marta
;
Muoio, A.
;
Scuderi, V.
;
Privitera, S.
;
Reitano, R.
;
Boninelli, S.
;
La Via, F.
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
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273
since deposited on 2024-03-26
Acq. date: 2025-10-25
Citations
Metrics
Views
273
since deposited on 2024-03-26
Acq. date: 2025-10-25
Citations