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Browsing by Author "Caligiore, A."

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    SEM proximity effect for poly gate patterns

    Finders, Jo
    ;
    Potoms, Goedele  
    ;
    Ronse, Kurt  
    ;
    Van den hove, Luc  
    ;
    Van Driessche, Veerle  
    Journal article
    1997, Microlithography World, (6) 4, p.5-10

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