Publication:

SEM proximity effect for poly gate patterns

Date

1997

Journal article

Simple item page Full metadata Statistics

Files

1850.pdf 516.09 KB

Author(s)

;

Potoms, Goedele

;

;

Van den hove, Luc

;

Van Driessche, Veerle

;

Tzviatkov, Plamen

;

;

Journal

Microlithography World

Metrics

1915 since deposited on 2021-09-30

Acq. date: 2026-01-05