Browsing by Author "Campbell, J."
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Publication Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS
;Kraus, P.A. ;Chua, T.C. ;Ahmed, K.Z. ;Campbell, J. ;Nouri, F. ;Cruise, J.Rothschild, AudeJournal article2004, Semiconductor Fabtech, 23, p.73-76