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Browsing by Author "Caner, Oezge"

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    Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

    Wu, Meiyi  
    ;
    de Marneffe, Jean-Francois  
    ;
    Opsomer, Karl  
    ;
    Detavernier, Christophe
    Journal article
    2021, MICRO AND NANO ENGINEERING, 12, p.100089

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