Browsing by Author "Caner, Oezge"
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Publication Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask
Journal article2021, MICRO AND NANO ENGINEERING, 12, p.100089
Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask