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Browsing by Author "Capponi, Simona"

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    Study of stress evolution during full silicidation for gate stacks

    Torregiani, Cristina
    ;
    Kittl, Jorge
    ;
    Capponi, Simona
    ;
    Vanhoyland, Geert
    ;
    Brongersma, Sywert  
    Proceedings paper
    2005-05, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.249-256

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