Browsing by Author "Carpaij, Rene"

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Experimental verification of high-NA imaging simulations using SHARP

Davydova, Natalia
;
Liu, Fei
;
Benk, Markus
;
van Setten, Eelco
;
Bottiglieri, Gerardo
Proceedings paper
2020, Conference on Extreme Ultraviolet Lithography, SEP 21-25, 2020
Fundamental understanding and experimental verification of bright versus dark field imaging

Davydova, Natalia
;
Finders, Jo
;
van Lare, Claire
;
McNamara, John
;
Van Setten, Eelco
;
Zekry, Joseph
Proceedings paper
2020, Extreme Ultraviolet Lithography 2020, 21/09/2020, p.115170P