Experimental verification of high-NA imaging simulations using SHARP

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Author(s)

Davydova, Natalia

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van Setten, Eelco

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Bottiglieri, Gerardo

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van Oosten, Anton

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Franke, Joern-Holger

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Goldberg, Kenneth

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Naulleau, Patrick

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Fliervoet, Timon

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Journal

Proceedings of SPIE

Metrics

1771 since deposited on 2021-11-02

Acq. date: 2025-10-23