Browsing by Author "Carroll, Alan"
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Publication Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithography
;Grella, Luca ;Carroll, Alan ;Murray, Kirk ;McCord, Mark A. ;Tong, William M.Brodie, Alan D.Journal article2013, Journal of Micro/Nanolithography MEMS and MOEMS, (12) 3, p.31107