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Browsing by Author "Carter, Rusty"

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    Model-based design improvements for the 100nm lithography generation

    Lucas, Kevin
    ;
    Postnikov, Sergei
    ;
    Patterson, Kyle
    ;
    Yuan, Min-Chi
    ;
    Thomas, Carla
    ;
    Thompson, Matt
    Proceedings paper
    2002, Optical Microlithograhy XV, 5/03/2002, p.215-226

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