Publication:

Model-based design improvements for the 100nm lithography generation

Date

2002

Proceedings Paper

Simple item page Full metadata Statistics

Files

18036.pdf 3.71 MB

Author(s)

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Postnikov, Sergei

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Patterson, Kyle

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Montgomery, Patrick

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Statistics

1878 since deposited on 2021-10-14

Acq. date: 2026-05-18