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Browsing by Author "Case, Carlye"

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    Etching of thermal SiO2 in supercritical CO2

    Malhouitre, Stephane
    ;
    Van Hoeymissen, Jan
    ;
    Case, Carlye
    ;
    Granger, Pascal
    Proceedings paper
    2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.71-78

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