Browsing by Author "Case, Carlye"
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Publication Etching of thermal SiO2 in supercritical CO2
;Malhouitre, Stephane ;Van Hoeymissen, Jan ;Case, CarlyeGranger, PascalProceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.71-78