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Conference contributions
Etching of thermal SiO2 in supercritical CO2
Publication:
Etching of thermal SiO2 in supercritical CO2
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Malhouitre, Stephane
;
Van Hoeymissen, Jan
;
Case, Carlye
;
Granger, Pascal
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Acq. date: 2026-02-24
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Statistics
Views
1886
since deposited on 2021-10-16
1
last month
Acq. date: 2026-02-24
Citations