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Browsing by Author "Casella, C."

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    Publication

    Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology

    Johnson, J.
    ;
    Goux, Ludovic  
    ;
    Schwitters, Michael
    ;
    Paraschiv, Vasile  
    ;
    Maes, David
    ;
    Haspeslagh, Luc  
    Oral presentation
    2003, Conference of Surface Science and their Applications - CLACSA-11

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