Publication:
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1978 since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations
Metrics
Views
1978 since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations