Publication:
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
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1980 since deposited on 2021-10-15
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Acq. date: 2026-08-06
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1980 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-08-06
Citations