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Browsing by Author "Castellanos, Sonia"

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    Lloyd's Mirror Interference Lithography Below a 22-nm Pitch with an Accessible, Table-top, 13.5 nm High-Harmonic EUV Source

    Dorney, Kevin  
    ;
    Castellanos, Sonia
    ;
    Witting Larsen, Esben  
    ;
    Holzmeier, Fabian  
    Proceedings paper
    2021, SPIE Advanced Lithography Novel Patterning Technologies 2021, 22/02/2021

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