Publication:
Lloyd's Mirror Interference Lithography Below a 22-nm Pitch with an Accessible, Table-top, 13.5 nm High-Harmonic EUV Source
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2266 since deposited on 2021-10-31
Acq. date: 2026-05-18
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Statistics
Views
2266 since deposited on 2021-10-31
Acq. date: 2026-05-18
Citations