Browsing by Author "Castro, Raul"
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Publication Investigations of capacitively-coupled plasmas by electrostatic probe technique
Proceedings paper2015, 30th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2015, p.1-4Publication Tuned electrostatic probe for RF plasma diagnostics
Proceedings paper2013, Symposium on Microelectronics Technology and Devices - SBMICRO, 2/09/2013, p.1-4