Browsing by Author "Cescato, Lucila"
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Publication Diffractive phase-shift lithography photomask operating in proximity printing mode
Journal article2010, Optics Express, (18) 16, p.16387-16405Publication Phase-shift photomask designed by scalar diffractiontheory
Proceedings paper2009-09, 24th Symposium on Microelectronics Technology and Devices - SBMicro, 31/08/2009, p.487-497