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Conference contributions
Phase-shift photomask designed by scalar diffractiontheory
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Phase-shift photomask designed by scalar diffractiontheory
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Date
2009-09
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Cirino, Giuseppe
;
Mansano, Ronaldo
;
Verdonck, Patrick
;
Cescato, Lucila
;
Marega, E.
;
Goncalves Neto, Luiz
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Views
1829
since deposited on 2021-10-17
1
last month
1
last week
Acq. date: 2025-12-15
Citations