Browsing by Author "Ceyssens, F."
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Publication A parylene temporary packaging technique for MEMS wafer handling
Journal article2012, Sensors and Actuators A: Physical, 186, p.289-297Publication A Parylene temporary packaging technique for MEMS wafer handling
Proceedings paper2011, Eurosensors XXV, 4/09/2011, p.1501-1504Publication A parylene temporary packaging technique for MEMS wafer handling
Journal article2011, Procedia Engineering, 25, p.1501-1504