Publication:
A parylene temporary packaging technique for MEMS wafer handling
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
2 since deposited on 2021-10-19
Acq. date: 2026-02-27
Views
1892 since deposited on 2021-10-19
Acq. date: 2026-02-27
Citations
Statistics
Downloads
2 since deposited on 2021-10-19
Acq. date: 2026-02-27
Views
1892 since deposited on 2021-10-19
Acq. date: 2026-02-27
Citations