Browsing by Author "Chévrier, Jean-Baptiste"
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Publication A infrared pneumatic detector made by micromachining technology
Publication A silicon micromachined magnetic actuator using a two layer electroplating process
Proceedings paper1996, Actuator 96. 5th International Conference on New Actuators. Conference Proceedings; 26-28 June 1996; Bremen, Germany., p.88-91Publication An infrared pneumatic detector made by micromachining technology
Publication Micromachined infrared pneumatic detector for gas sensor
Publication Micromachined infrared pneumatic detector for gas sensor
Publication Thin film boron doped polycrystalline silicon70%germanium30% for thermopiles
Proceedings paper1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 25/06/1995, p.210-213Publication Thin-film boron-doped polycrystalline silicon70%-germanium30% for thermopiles
Journal article1996, Sensors and Actuators A, A53, p.325-329Publication Towards integrated microrelays using electromagnetic actuation
Proceedings paper1996, Proceedings Eurosensors X : The 10th European Conference on Solid-State Transducers, 8/09/1996, p.1193-1196