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Articles
An infrared pneumatic detector made by micromachining technology
Publication:
An infrared pneumatic detector made by micromachining technology
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Date
1995
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chévrier, Jean-Baptiste
;
Baert, Kris
;
Slater, Tim
Journal
J. Micromechanics and Microengineering
Abstract
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1942
since deposited on 2021-09-29
2
last month
Acq. date: 2025-12-15
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Metrics
Views
1942
since deposited on 2021-09-29
2
last month
Acq. date: 2025-12-15
Citations