Publication:
An infrared pneumatic detector made by micromachining technology
Date
| dc.contributor.author | Chévrier, Jean-Baptiste | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Slater, Tim | |
| dc.date.accessioned | 2021-09-29T13:04:29Z | |
| dc.date.available | 2021-09-29T13:04:29Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/551 | |
| dc.source.beginpage | 193 | |
| dc.source.endpage | 195 | |
| dc.source.issue | 2 | |
| dc.source.journal | J. Micromechanics and Microengineering | |
| dc.source.volume | 5 | |
| dc.title | An infrared pneumatic detector made by micromachining technology | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |