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Browsing by Author "Chang, C-H."

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    Publication

    Characterization of annealing and dopant activation processes using Differential Hall Effect Metrology (DHEM)

    Joshi, Abhijeet
    ;
    Rengo, Gianluca  
    ;
    Porret, Clément  
    ;
    Lin, Kun-Lin
    ;
    Chang, C-H.
    ;
    Basol, Bulent
    Proceedings paper
    2021, Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11, 30/05/2021, p.113

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