Browsing by Author "Chang, Chia-He"

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Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)

Joshi, Abhijeet
;
Rengo, Gianluca
;
Porret, Clément
;
Lin, Kun-Lin
;
Chang, Chia-He
;
Basol, Bulent
Proceedings paper
2021-05, 239th ECS Meeting, 2021/05/3 - 2021/06/03
Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)

Joshi, Abhijeet
;
Rengo, Gianluca
;
Porret, Clément
;
Lin, Kun-Lin
;
Chang, Chia-He
;
Basol, Bulent
Meeting abstract
2021-05, 239th ECS Meeting: G01: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11, 2021/05/30 - 2021/06/03, p.1009