Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)
Publication:
Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)
Date
2021-05
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Accepted version
280.94 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Joshi, Abhijeet
;
Rengo, Gianluca
;
Porret, Clément
;
Lin, Kun-Lin
;
Chang, Chia-He
;
Basol, Bulent
Journal
ECS Transactions
Abstract
Description
Metrics
Downloads
152
since deposited on 2021-12-15
3
last week
Acq. date: 2025-10-29
Views
1774
since deposited on 2021-12-15
Acq. date: 2025-10-29
Citations
Metrics
Downloads
152
since deposited on 2021-12-15
3
last week
Acq. date: 2025-10-29
Views
1774
since deposited on 2021-12-15
Acq. date: 2025-10-29
Citations