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Browsing by Author "Chang, V.S."

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    Novel process to pattern selectively dual dielectric capping layers using soft-mask only

    Schram, Tom  
    ;
    Kubicek, Stefan  
    ;
    Rohr, Erika
    ;
    Brus, Stephan  
    ;
    Vrancken, Christa  
    ;
    Chang, Shou-Zen
    Proceedings paper
    2008, Symposium on VLSI Technology Digest of Technical Papers, 17/06/2008, p.44-45
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    Strain enhanced Low-VT CMOS featuring La/Al-doped HfSiO/TaC and 10ps invertor delay

    Kubicek, Stefan  
    ;
    Schram, Tom  
    ;
    Rohr, Erika
    ;
    Paraschiv, Vasile  
    ;
    Vos, Rita  
    ;
    Demand, Marc  
    Proceedings paper
    2008, Symposium on VLSI Technology Digest of Technical Papers, 17/06/2008, p.130-131

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