Browsing by Author "Chang, V.S."
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Publication Novel process to pattern selectively dual dielectric capping layers using soft-mask only
Proceedings paper2008, Symposium on VLSI Technology Digest of Technical Papers, 17/06/2008, p.44-45Publication Strain enhanced Low-VT CMOS featuring La/Al-doped HfSiO/TaC and 10ps invertor delay
Proceedings paper2008, Symposium on VLSI Technology Digest of Technical Papers, 17/06/2008, p.130-131