Browsing by Author "Chang, Yi-Han"
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Publication A yield prediction model and cost of ownership for productivity enhancement beyond imec 5nm technology node
Proceedings paper2022, Conference on DTCO and Computational Patterning, APR 24-MAY 27, 2022, p.1205203Publication Design, patterning, and process integration overview for 2nm node
Proceedings paper2022, Conference on DTCO and Computational Patterning, APR 24-MAY 27, 2022, p.120520FPublication Study of EUV stochastic defect on wafer yield
; ; Kim, Ryan Ryoung hanProceedings paper2024, Conference on DTCO and Computational Patterning III, FEB 26-29, 2024, p.1295404