Publication:

Design, patterning, and process integration overview for 2nm node

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2615311

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Author(s)

Sherazi, Yasser

;

;

Drissi, Youssef

;

;

Vega Gonzalez, Victor

;

Kim, Ryan Ryoung Han

;

Journal

Proceedings of SPIE

Metrics

1550 since deposited on 2022-09-16

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Acq. date: 2025-12-10