Browsing by Author "Chehadi, Zeinab"
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Publication Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024Publication Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis