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Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing
Publication:
Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing
Date
2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732322
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chehadi, Zeinab
;
Daubriac, Richard
;
Lu, Lu
;
Huet, Karim
;
Tokei, Zsolt
;
Cancellara, Leonardo
;
Cristiano, Fuccio
;
Thuries, Louis
Journal
N/A
Abstract
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154
since deposited on 2025-03-06
Acq. date: 2025-10-23
Citations
Metrics
Views
154
since deposited on 2025-03-06
Acq. date: 2025-10-23
Citations