Publication:

Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing

Date

2024
Proceedings Paper
https://doi.org/10.1109/IITC61274.2024.10732322
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dc.contributor.authorChehadi, Zeinab
dc.contributor.authorDaubriac, Richard
dc.contributor.authorLu, Lu
dc.contributor.authorHuet, Karim
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCancellara, Leonardo
dc.contributor.authorCristiano, Fuccio
dc.contributor.authorThuries, Louis
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.date.accessioned2025-06-05T14:11:02Z
dc.date.available2025-03-06T20:46:08Z
dc.date.available2025-06-05T14:11:02Z
dc.date.issued2024
dc.description.wosFundingTextThis project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union's Horizon 2020 research and innovation program and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel. The project has also received funding from the French PSPC project IT2-FR. The authors gratefully acknowledge T. Tabata and M.A. Khaled for supporting the work.
dc.identifier.doi10.1109/IITC61274.2024.10732322
dc.identifier.eisbn979-8-3503-8517-5
dc.identifier.isbn979-8-3503-8518-2
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45333
dc.publisherIEEE
dc.source.conference2024 International Interconnect Technology Conference
dc.source.conferencedateJUN 03-06, 2024
dc.source.conferencelocationSan Jose
dc.source.journalN/A
dc.source.numberofpages3
dc.title

Investigation of the enlargement of Ru grains and failure modes analysis in microsecond UV laser annealing

dc.typeProceedings paper
dspace.entity.typePublication
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