Browsing by Author "Chen, F."

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Experimental verification of a model based decomposition method for double dipole lithography

Eurlings, M.
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Hsu, S.D.
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Hendrickx, Eric
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op 't Root, W.
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Laidig, T.L.
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Chiou, T.B.
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Chen, A.
;
Chen, F.
Proceedings paper
2004, Optical Microlithography XVII, 22/02/2004, p.1225-1236
Exploring W-Cu hybrid dual damascene metallization for future nodes

Lei, W.
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Pethe, S.
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Hwang, S.
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Chen, F.
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Wu, Z.
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Machillot, J.
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Cockburn, A.
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Jansen, A.
Proceedings paper
2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021
Gray bar masking: fabrication and imaging for 193 nm

Smith, Bruce
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Vandenberghe, Geert
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Martin, P. W.
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Rack, P.
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Hsu, S.
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Chen, F.
Oral presentation
2001, 21st Annual BACUS Symposium on Photomask Technology; October 2001; Monterey, CA, USA.