Publication:

Exploring W-Cu hybrid dual damascene metallization for future nodes

Date

2021

Proceedings Paper

https://doi.org/10.1109/IITC51362.2021.9537410

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Author(s)

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van der Veen, Marleen

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Varela Pedreira, Olalla

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Jourdan, Nicolas

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Lariviere, Stephane

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Struyf, Herbert

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Journal

na

Statistics

1698 since deposited on 2022-05-05

Acq. date: 2026-02-05