Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Chen, H.C."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Self aligned CuGeN process for 32/22nm nodes and beyond

    Liu, C.S.
    ;
    Chen, H.C.
    ;
    Bao, T.I.
    ;
    Van Olmen, Jan  
    ;
    Croes, Kristof  
    ;
    Van Besien, Els  
    Proceedings paper
    2008, 11th IEEE International Interconnect Technology Conference - IITC, 1/06/2008, p.199-201

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings