Browsing by Author "Chen, Jimmy"
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Publication Diode characteristics and thermal donor formation in germanium-doped silicon substrates
; Publication Electrical properties along grain boundaries in multicrystalline silicon measured by capacitance technique
Oral presentation2011, E-MRS Spring Meeting Symposium R: Advanced Inorganic Materials and Concepts for PhotovoltaicsPublication Large area EUV via yield analysis for single damascene process: voltage contrast, CD and defect metrology
Proceedings paper2019, International Conference on Extreme Ultraviolet Lithography 2019, 16/09/2019, p.11147OB