Publication:

Large area EUV via yield analysis for single damascene process: voltage contrast, CD and defect metrology

Date

2019
Proceedings Paper
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Author(s)

Blanco, Victor  
;
Paolillo, Sara  
;
van der Veen, Marleen  
;
Lariviere, Stephane  
;
Lorusso, Gian  
;
De Poortere, Etienne  
;
Tabery, Cyrus
;
Qiao, Fu
;
Lai, Shu-yu
;
Kea, Marc  
;
Wang, Luke
;
Su, Yu Chi
;
Oh, Joe
;
Huang, Jim
;
Chen, Jimmy
;
Huang, Jonathan

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2076 since deposited on 2021-10-27
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Acq. date: 2026-04-05

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