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Browsing by Author "Chen, S.-C."

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    Scaled, novel effective workfunction metal gate stacks for advanced Low-VT, gate-all-around vertically stacked nanosheet FETs with reduced vertical distance between sheets

    Veloso, Anabela  
    ;
    Simoen, Eddy  
    ;
    Oliveira, Alberto
    ;
    Vaisman Chasin, Adrian  
    ;
    Chen, S.-C.
    ;
    Lin, Y.
    Proceedings paper
    2019, 2019 International Conference on Solid State Devices and Materials (SSDM 2019), 2/09/2019, p.559-560

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